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Sunday, July 06, 2008
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Teaching:
Courses Taught by Professor Jain
Professor Kanti Jain teaches two courses — a graduate-level in-depth
course on Micro/Nanolithography, offered in the Fall, and a senior undergraduate/graduate-level
course covering the broad scope of microelectronic process technologies, offered
in the Spring.
ECE 598-KJ
Micro/Nanolithography:
Science, Technology, and Applications
Fall 2008
Credit: 4 Hours
This course provides a comprehensive foundation in the broad field of
micro/nanolithography for graduate students in varied research areas. Lithography
is the central process technology used in fabrication of a vast array of micro/nano
structures required in microelectronic devices, displays, flexible electronics,
microelectromechanical systems, and biotechnology. The course covers the
science of microlithography, including optical imaging, photochemistry, and
materials issues; the extensive technological developments, including state-of-the-art
commercial lithography systems; and the innumerable applications of lithography
in diverse fields.
Outline of topics
ECE 484
Advanced Microelectronic Process Technologies
Spring 2008
Credit: 3 Hours
This course teaches seniors and first-year graduate students in Electrical
and Computer Engineering advanced topics in microelectronic device processing.
It covers the principles of advanced methods of pattern delineation, deposition,
ion implantation, material growth, etching, and isolation, and how these are
applied to produce novel and high-performance devices and circuits in various
electronic materials with special emphasis on semiconductors. Issues in computer
simulation of processes and the manufacturing of devices and circuits are also
covered.
Outline of topics
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